Rotatable Magnetrons
Rotatable Magnetrons
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Rotatable magnetrons are cylindrical magnets that can be rotated about their central axis. They are used in microwave ovens, as the magnetic field created by the rotating magnetron can be used to generate microwaves which heat food. The rotating motion of the magnetron also ensures that microwaves are evenly distributed throughout the oven cavity.
... The Gencoa Rotatable System (GRS) family of rotatable magnetrons covers four styles of end-block, with two options of internal flange mount style, and options for horizontal cantilever and vertical mounted rotatables. ...
... The deposition with rotatable magnetrons has become the preferred standard process over the last 25 years. Sputtering with these components offers the advantage of longer target lifetime and thus extended production time. ...
... arrangement for DC or RF Up to 12 magnetrons Up to 8” circular cathodes and 30” planar rectangular magnetrons Optional rotatable magnetrons with nodule reduction (for TCO) DC power supply (with pulsing capabilities, 5-800KHz with programmable duty cycle) Hipims (AC or dual) RF power ...
... Rectangular (Linear) Magnetrons Circular Magnetrons Rotatable Magnetrons ...
... 450 mm x 400 mmIon beam sourceTwo 380 mm linear microwave ECR sources (LIN380-e)Sputter sourceTwo rotatable magnetrons with 680 mm lengtTypical deposition rateSiO2: 85 nm x mm/s (dynamic rate)Uniformity variation≤ 4 % (σ/mean)Throughput12 Carrier/h ≈ 500,000 blades/hBase pressure< 1 x 10-6 ...
... Modular machine concept Horizontal substrate transport – with and without carrier Usage of rotatable cylindrical magnetrons for highest utilization of target material Highest deposition rates Temperature processing before and during deposition available Gas separation by dynamic slit ...
... Circular Magnetrons Rectangular Planar Magnetrons Rotatable Magnetrons ...
... Two rotatable magnetrons with 680 mm ...
... Rotatable cylindrical magnetrons are used for static sputtering of large substrates (e.g CLUSTERLINE® 600), where an extremely long target life can be achieved. ...
