Wafer Metrology Tool
Wafer Metrology Tool
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Wafer metrology tools are instruments used in the semiconductor industry to measure, inspect, and analyze the characteristics of semiconductor wafers, such as their thickness, flatness, and surface topography. These tools use precision optical, electrical, and mechanical techniques to measure the physical and electrical characteristics of a wafer and its components. The data gathered from the metrology tools is used to ensure that the wafers meet the required specifications for the final product.
... SemDex A is a fully-automated wafer metrology tool developed for the semiconductor industry to provide process reliability and quality assurance. ...
... Fully automated wafer metrology tool ...
... The FRT MicroProf® FE is FormFactor’s standard, fully automated 2D/3D wafer metrology tool. It combines the capabilities of the established MicroProf 300 with a wafer handling system within an Equipment Front End Module (EFEM). With fully SEMI-compliant metrology solutions and almost ...
... A SECS/GEM integrated wafer metrology tool for autonomous semiconductor ...
... Thickness Range 500Å - 10µm Target thickness tolerance ± 5% Within Wafer uniformity ± 3% Metrology tool Filmetrics Standard Process Temp 1050° ...
... wafer metrology tool during the first quarter of 2019, while there were no semi-automated wafer metrology tool sales during the first quarter of 2020. This quarter-to-quarter variance was partially offset by an increase in military sales of our engine vibration and balancing ...