Cymer

Cymer announces the first shipment of its XLR 960ix light source, extending light source advancements for next generation semiconductor manufacturing. Cymer announces the first customer installation of its XLR 860ix light source, expected to be used in the production of chips at advanced logic and memory nodes. In January, Cymer employees join founders Bob Akins and Rick Sandstrom in celebrating the company’s 30th Anniversary. Cymer introduces OnPulse Plus™ and SmartPulse™ to provide chipmakers with data collection, reporting, and analysis tools. Continuing Moore’s Law, Cymer delivers first production-ready laser-produced plasma EUV source to a scanner manufacturer. Cymer receives prestigious Berthold Leibinger Innovationspreis Award for Advancement in Light Source Technology. Cymer introduces High Performance Upgrades to existing product lines, allowing for light sources to extend their lifetimes. Cymer introduces the XLR® 600i, the first 90W ArF light source designed for high volume immersion production and double patterning lithography at 32nm and beyond.